SORTER
Wafer Sorter
Wafer Sorter automatic sorting and handling equipment is used for 8-inch wafers. It includes two infeed areas, two outfeed areas, an alignment station, a flip station and a temporary storage area. The infeed area has a mapping function, which allows you to know the current In the playback status, the alignment station has a wafer mark scanning function, which can know the wafer mark. The conversion method includes splitting the batch (only according to the SECS command), batching (only according to the SECS command), and one-to-one transmission. (Can be sorted according to wafer marking number or according to SECS command). The feeding area can be customized to correspond to different cassette types.
- Both side non-contact wafer/thickness : 200um/750um
- Applicable to 7 different CST (13 slot & 25 slot)
- Edge contact with vacuum adsorption fork
Item | Specification |
Product | 8”wafer Thickness: 200um/750um Warpage<3mm |
In/out Port | > 4 port |
Wafer Mapping | Yes |
Notch/flat finding/Aligner | Yes |
Flip | Non-contact or Edge contact |
Wafer ID reader | OCR (Optional backside OCR) |
UPH | 115 |
SECS | Option |
Dimension | W 2850 x L 2550 x H 2000 mm |
SORTER | Made in Taiwan Intelligent Process Equipment | Shuz Tung
Based in Taiwan since 1979, Shuz Tung Machinery Industrial Co., Ltd. is a manufacturer of intelligent process equipment. It's main intelligent process equipment include, SORTER, semiconductor automation equipment, semiconductor metrology and inspection equipment, flat panel display turnkey equipment, TFT-LCD module process whole line equipment and wafer shipper automatic packing and unpacking machines. We offer customized designs for optimal equipment efficiency in high-tech industries. Prioritizing speed of production, quality and environmental friendliness ensures competitive advantage and significant added value.
Established in 1979, with 43 years vast experience and resources in customized equipment manufacturing, and outstanding optical, mechanical, electronic, software, and system integration ability, Shuz Tung Machinery Industrial focuses on the core technologies, including Precision Mold Manufacturing, Laser Repair and Cutting, High Accuracy Bonding (PCB Bonder), Automatic Optical Inspection (AOI), Artificial Intelligence Imaging, and Turnkey Solution for Smart Manufacturing.
Shuz Tung has been providing customers with high quality intelligent process equipment since 1979, both with advanced technology and 30 years of experience, Shuz Tung ensures that each customer's needs are met.